31:
179:(ALD), as the solution for the manufacturing of the EL-devices which required thin films with very high dielectric strength. The technology was brought into industrial production of EL devices in the mid-1980s by Lohja Corporation in Finland. Atomic Layer Deposition later became one of the key manufacturing techniques in the
199:
Corporation, created via the fusion of Neste
Corporation, and the national Electric Utility Company. Suntola’s activity in Fortum was focused to renewable energies and advanced energy technologies. He retired from Fortum in 2004, but continues as a Board Member in Picosun Oy, a Finnish manufacturer
195:, a major supplier of semiconductor manufacturing equipment; Microchemistry Ltd. became ASM Microchemistry Oy as ASM’s Finnish daughter company. In 1997, preceding the acquisition of Microchemistry Ltd, Suntola started as Research Fellow in the national energy company
190:
to apply the ALD technology to new application areas like thin film photovoltaic devices, heterogeneous catalysts, and most importantly, to semiconductor devices. In 1998, Microchemistry Ltd., and the ALD technology, was sold to Dutch
315:
S. Haukka, E.-L. Lakomaa, T. Suntola, "Adsorption controlled preparation of heterogeneous catalysts", Adsorption and its
Applications in Industry and Environmental Protection, A.Dabrowski, ed, Elsevier Science Publishers
509:
333:
R. L. Puurunen, H. Kattelus, T. Suntola, "Atomic layer deposition in MEMS technology", Ch. 26 of
Handbook of Silicon Based MEMS Materials and Technologies, Ed. V. Lindroos et al. , pp. 433–446, Elsevier,
124:(born 1943) is a Finnish physicist, inventor, and technology leader. He is best known for his pioneering research in materials science, developing the thin film growth technique called
312:
T. Suntola, "Atomic Layer
Epitaxy", Handbook of Crystal Growth 3, Thin Films and Epitaxy, Part B: Growth Mechanisms and Dynamics, Chapter 14, Elsevier Science Publishers B.V., 1994.
253:
The extremely thin isolating or conducting films needed in microprocessors and computer memory devices can only be manufactured using the ALD technology developed by Tuomo
Suntola.
148:. He showed interest in technology early on, building wooden replicas of second world war aircraft. In his teens his interests expanded and he progressed to radios and amplifiers.
624:
255:" The 74-year-old was awarded one million euros ($ 1.18 million). His technology is used to manufacture ultra-thin material layers for a variety of devices such as computers,
387:
Ahvenniemi, Esko; Akbashev, Andrew R.; Ali, Saima; Bechelany, Mikhael; Berdova, Maria; Boyadjiev, Stefan; Cameron, David C.; Chen, Rong; Chubarov, Mikhail (2016-12-16).
510:"2018 Millennium Technology Prize for Tuomo Suntola – Finnish physicist's innovation enables manufacture and development of information technology products"
366:
297:
1985-03-05/1990-03-13, US 4,907,862 Suntola, Method for generating electronically controllable color elements and color display based on the method
389:"Review Article: Recommended reading list of early publications on atomic layer deposition—Outcome of the "Virtual Project on the History of ALD""
300:
T. Suntola, "Atomic Layer
Epitaxy", Materials Science Reports, Volume 4, number 7, December 1989, 0920-2307/89, Elsevier Science Publishers B.V.
228:, Suntola traces the development of the scientific picture of reality from antique to present day, culminating in the Dynamic Universe theory.
171:
In 1974, Suntola started the development of thin film electroluminescent displays in the
Finnish company Instrumentarium Oy. He introduced the
276:
T. Suntola, "On the
Mechanism of Switching Effects in Chalcogenide Thin Films", Solid-State Electronics 1971, Vol. 14, pp. 933–938
634:
629:
161:
328:
306:
1991-07-16/2002-12-31, US 6,500,780 Suntola et al., Method for preparing heterogeneous catalysts of desired metal content
208:
Since the 1990s, Suntola has been working on a theory which he claims to be an replacement for the standard theories of
473:
346:
574:
157:
67:
285:
1979-02-28/1983-11-01, US 4,413,022 Suntola, Pakkala, Lindfors, Method for performing growth of compound thin films
490:
320:
303:
1990-01-16/2003-03-18, US 6,534,431 Suntola et al., Process and apparatus for preparing heterogeneous catalysts
468:(4th ed.). Physics foundations society and the Finnish society for natural philosophy. pp. 294–295.
639:
338:
87:
529:
248:
91:
609:
551:
588:
176:
125:
77:
614:
546:
282:
1974-11-29/1977-11-15, US 4,058,430 Suntola, Antson, Method for producing compound thin films
180:
594:
619:
209:
172:
160:. After completing his PhD, Suntola made his first industrial development while working at
492:
The short history of science – or the long path to the union of metaphysics and empiricism
321:
The Short
History of Science - or the long path to the union of metaphysics and empiricism
8:
288:
1980-08-20/1983-06-14, US 4,388,554 Suntola, Antson, Electroluminescent display component
186:
In 1987, Suntola started
Microchemistry Ltd as a subsidiary of the national oil company
568:
294:
T. Suntola, J. Hyvärinen, "Atomic Layer Epitaxy", Annu. Rev. Mater. Sci. 15 (1985) 177
556:
469:
410:
342:
324:
251:
for his contribution to the development of information technology on the basis that "
213:
192:
109:
444:
400:
339:
The Dynamic Universe - Toward a unified picture of physical reality, Fourth edition
200:
of ALD reactors. He has important patents on ALD technology and thin film devices.
145:
433:"A Short History of Atomic Layer Deposition: Tuomo Suntola's Atomic Layer Epitaxy"
260:
591:
A short history of Atomic Layer Deposition: Tuomo Suntola's Atomic Layer Epitaxy
589:
A Short History of Atomic Layer Deposition: Tuomo Suntola's Atomic Layer Epitaxy
30:
309:
T.Suntola, "CdTe Thin-Film Solar Cells", MRS Bulletin, Vol. XVIII, No. 10, 1993
603:
560:
414:
264:
291:
T. Suntola, "Atomic Layer Epitaxy", Tech. Digest of ICVGE-5, San Diego, 1981
449:
367:"ALD pioneer Tuomo Suntola explains how his invention sustains Moore's Law"
279:
1972-11-12/1979-08-21, US 4,164,868 Suntola, Capacitive humidity transducer
242:
that paved the way for the development of nanoscale semiconductor devices"
393:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
256:
156:
In 1971, Tuomo Suntola earned his PhD in semiconductor physics from the
405:
388:
217:
141:
432:
530:"Tech 'Nobel' awarded to Finnish physicist for small smart devices"
466:
The Dynamic Universe - Toward a unified picture of physical reality
222:
The Dynamic Universe – Toward a unified picture of physical reality
165:
137:
47:
196:
168:, a Finnish company specialized in meteorological instruments.
386:
187:
238:"Honoring the Pioneer in Atomic Layer Deposition Techniques
625:
Knights First Class of the Order of the Lion of Finland
512:(Press release). Technology Academy Finland. 2018-05-22
236:In 2004, Suntola received the European SEMI Award
90:- Knight 1st Class, European SEMI Award in 2004,
601:
595:Tuomo Suntola » Physics Foundations Society
555:(in Swedish). No. 1985–10. p. 22-23.
544:
430:
220:. The theory has been published in the book
164:, a thin film humidity sensor "Humicap" for
267:, enabling high performance in small size.
203:
29:
448:
404:
359:
162:VTT Technical Research Centre of Finland
547:"Tio års forskning gav ingenjörspriset"
488:
463:
270:
151:
602:
426:
424:
175:(ALE) technology, nowadays known as
13:
538:
14:
651:
582:
421:
247:In 2018, Suntola won the Finnish
158:Helsinki University of Technology
68:Helsinki University of Technology
181:semiconductor device fabrication
635:21st-century Finnish physicists
630:20th-century Finnish physicists
545:Christer Ekebom (1985-06-05).
523:
502:
482:
457:
380:
16:Finnish physicist and inventor
1:
573:: CS1 maint: date and year (
498:(3rd, complemented ed.).
353:
131:
226:The Short History of Science
88:Order of the Lion of Finland
7:
249:Millennium Technology Prize
92:Millennium Technology Prize
44:1943 (age 80–81)
10:
656:
437:Chemical Vapor Deposition
231:
115:
105:
98:
83:
73:
63:
55:
40:
28:
21:
431:Puurunen, R. L. (2014).
489:Suntola, Tuomo (2018).
464:Suntola, Tuomo (2018).
204:Dynamic universe theory
177:atomic layer deposition
126:atomic layer deposition
78:Atomic layer deposition
532:Phys.org, May 22, 2018
450:10.1002/cvde.201402012
144:, in 1943, during the
443:(10–11–12): 332–344.
224:. In a related book,
271:Notable publications
173:atomic layer epitaxy
152:Education and career
136:Suntola was born in
640:People from Tampere
341:, September 2018,
610:Finnish inventors
406:10.1116/1.4971389
329:978-952-68101-0-2
323:, September 2018
214:quantum mechanics
193:ASM International
119:
118:
110:Materials science
100:Scientific career
647:
578:
572:
564:
533:
527:
521:
520:
518:
517:
506:
500:
499:
497:
486:
480:
479:
461:
455:
454:
452:
428:
419:
418:
408:
384:
378:
377:
375:
374:
363:
146:Continuation War
33:
19:
18:
655:
654:
650:
649:
648:
646:
645:
644:
600:
599:
585:
566:
565:
541:
539:Further reading
536:
528:
524:
515:
513:
508:
507:
503:
495:
487:
483:
476:
462:
458:
429:
422:
385:
381:
372:
370:
365:
364:
360:
356:
337:Tuomo Suntola,
319:Tuomo Suntola,
273:
261:microprocessors
234:
206:
154:
134:
64:Alma mater
51:
45:
36:
35:Suntola in 2014
24:
17:
12:
11:
5:
653:
643:
642:
637:
632:
627:
622:
617:
612:
598:
597:
592:
584:
583:External links
581:
580:
579:
540:
537:
535:
534:
522:
501:
481:
475:978-1461027034
474:
456:
420:
379:
357:
355:
352:
351:
350:
347:978-1461027034
335:
331:
317:
313:
310:
307:
304:
301:
298:
295:
292:
289:
286:
283:
280:
277:
272:
269:
265:memory devices
233:
230:
205:
202:
153:
150:
133:
130:
117:
116:
113:
112:
107:
103:
102:
96:
95:
85:
81:
80:
75:
74:Known for
71:
70:
65:
61:
60:
57:
53:
52:
46:
42:
38:
37:
34:
26:
25:
22:
15:
9:
6:
4:
3:
2:
652:
641:
638:
636:
633:
631:
628:
626:
623:
621:
618:
616:
615:Living people
613:
611:
608:
607:
605:
596:
593:
590:
587:
586:
576:
570:
562:
558:
554:
553:
548:
543:
542:
531:
526:
511:
505:
494:
493:
485:
477:
471:
467:
460:
451:
446:
442:
438:
434:
427:
425:
416:
412:
407:
402:
399:(1): 010801.
398:
394:
390:
383:
368:
362:
358:
348:
344:
340:
336:
332:
330:
326:
322:
318:
314:
311:
308:
305:
302:
299:
296:
293:
290:
287:
284:
281:
278:
275:
274:
268:
266:
262:
258:
254:
250:
245:
243:
239:
229:
227:
223:
219:
215:
211:
201:
198:
194:
189:
184:
182:
178:
174:
169:
167:
163:
159:
149:
147:
143:
139:
129:
127:
123:
122:Tuomo Suntola
114:
111:
108:
104:
101:
97:
93:
89:
86:
82:
79:
76:
72:
69:
66:
62:
58:
54:
49:
43:
39:
32:
27:
23:Tuomo Suntola
20:
550:
525:
514:. Retrieved
504:
491:
484:
465:
459:
440:
436:
396:
392:
382:
371:. Retrieved
369:. 2019-03-28
361:
263:and digital
252:
246:
241:
237:
235:
225:
221:
207:
185:
170:
155:
135:
121:
120:
99:
620:1943 births
257:smartphones
56:Nationality
604:Categories
516:2018-05-22
373:2020-05-25
354:References
316:B.V.,1998.
210:relativity
166:Vaisala Oy
132:Early life
569:cite news
561:0533-070X
415:0734-2101
218:cosmology
142:Pirkanmaa
50:, Finland
188:Neste Oy
138:Tampere
59:Finnish
48:Tampere
559:
472:
413:
345:
327:
232:Awards
197:Fortum
106:Fields
84:Awards
552:Forum
496:(PDF)
334:2010.
575:link
557:ISSN
470:ISBN
411:ISSN
343:ISBN
325:ISBN
216:and
94:2018
41:Born
445:doi
401:doi
606::
571:}}
567:{{
549:.
441:20
439:.
435:.
423:^
409:.
397:35
395:.
391:.
259:,
244:.
240:…
212:,
183:.
140:,
128:.
577:)
563:.
519:.
478:.
453:.
447::
417:.
403::
376:.
349:.
Text is available under the Creative Commons Attribution-ShareAlike License. Additional terms may apply.
.JPG)