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It has long been known that the best achievable spatial resolution of an optical microscope, that is the smallest feature it can observe, is of the order of the wavelength of the light λ, which is about 550 nm for green light. One route to improve this resolution is to use particles with smaller
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because of their similarity to aberrations in optical lenses. Those aberrations are reduced by installing in a microscope a set of specially designed auxiliary "lenses" which are called aberration correctors.
178:—not only the atoms, but also the chemical bonds could be observed. A movie has been recorded inside the microscope showing hopping of individual carbon atoms around a hole punched in a graphene sheet.
81:. The project was started in 2004; the operational microscope was built in 2008 and achieved the 0.05 nm resolution target in 2009. The microscope is a shared facility available to external users.
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with a relatively low energy spread of 0.8 eV at 300 keV. In order to reduce chromatic aberrations, this spread is further lowered to 0.13 eV at 300 keV and 0.08 eV at 80 keV using a
123:(STEM) modes. To minimize the mechanical vibrations, the microscope is located in a separate room within a sound-proof enclosure and is operated remotely. The electron source is a
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102:. The resolution of electron microscopes is limited not by the electron wavelength, but by intrinsic imperfections of electron lenses. These are referred to as
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camera. The filter makes it possible to select electrons scattered by specific chemical elements and so identify individual atoms in the sample being studied.
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The TEAM is based on a commercial FEI Titan 80–300 electron microscope, which can be operated at voltages between 80 and 300 keV, both in TEM and
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is a collaborative research project between four US laboratories and two companies. The project's main activity is design and application of a
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146:) are equipped with fifth-order spherical aberration correctors. The electrons are further energy filtered by a GIF filter and detected by a
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390:"Detection of Single Atoms and Buried Defects in Three Dimensions by Aberration-Corrected Electron Microscope with 0.5-Ă… Information Limit"
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Evolution of spatial resolution achieved with optical, transmission (TEM) and aberration-corrected electron microscopes (ACTEM).
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This article is about the TEAM 0.5 and TEAM I microscopes. For all aberration-corrected transmission electron microscopes, see
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J. C. Meyer; et al. (2008). "Direct
Imaging of Lattice Atoms and Topological Defects in Graphene Membranes".
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333:"Present status and future prospects of spherical aberration corrected TEM/STEM for study of nanomaterials"
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90:λ, such as high-energy electrons. Practical limitations set a convenient electron energy to 100–300
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The TEAM has been tested on various crystalline solids, resolving individual atoms in GaN (
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C. O. Girit; et al. (27 March 2009). "Graphene at the Edge: Stability and
Dynamics".
240:"Berkeley Scientists Produce First Live Action Movie of Individual Carbon Atoms in Action"
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Aberration-correction microscopes in the
Lawrence Berkeley National Laboratory
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Pennycook, S.J.; Varela, M.; Hetherington, C.J.D.; Kirkland, A.I. (2011).
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Transmission
Electron Aberration-Corrected Microscope (TEAM) Project
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Aberration-Corrected
Transmission Electron Microscopy (AC-TEM)
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448:"Atomic-Resolution Imaging with a Sub-50-pm Electron Probe"
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69:
and
Frederick Seitz Materials Research Laboratory at the
276:"Optics of high-performance electron Microscopes"
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46:, which is roughly half the size of an atom of
1027:Serial block-face scanning electron microscopy
730:Detectors for transmission electron microscopy
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280:Science and Technology of Advanced Materials
77:and CEOS companies, and is supported by the
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42:(TEM) with a spatial resolution below 0.05
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71:University of Illinois at Urbana-Champaign
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121:scanning transmission electron microscopy
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55:Lawrence Berkeley National Laboratory
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388:C. Kisielowski; et al. (2008).
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663:Timeline of microscope technology
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40:transmission electron microscope
1022:Precession electron diffraction
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475:10.1103/PhysRevLett.102.096101
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1:
446:R. Erni; et al. (2009).
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67:Oak Ridge National Laboratory
397:Microscopy and Microanalysis
357:10.1088/1468-6996/9/1/014111
300:10.1088/0031-8949/9/1/014107
53:The project is based at the
7:
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63:Argonne National Laboratory
10:
1315:
1007:Immune electron microscopy
925:Annular dark-field imaging
740:Everhart–Thornley detector
254:"The TEM project timeline"
18:
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1161:Hitachi High-Technologies
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417:10.1017/S1431927608080902
256:. lbl.gov. Archived from
79:U.S. Department of Energy
1186:Thermo Fisher Scientific
1012:Geometric phase analysis
900:Aberration-Corrected TEM
457:(Submitted manuscript).
337:Sci. Technol. Adv. Mater
935:Charge contrast imaging
745:Field electron emission
518:10.1126/science.1166999
455:Physical Review Letters
1125:Thomas Eugene Everhart
593:TEAM Project main site
31:
1130:Vernon Ellis Cosslett
950:Dark-field microscopy
108:chromatic aberrations
98: = 3.7–2.0
85:Scientific background
29:
1135:Vladimir K. Zworykin
785:Correlative light EM
694:Electron diffraction
94:that corresponds to
59:Berkeley, California
1294:Electron microscopy
1100:Manfred von Ardenne
1085:Gerasimos Danilatos
992:Electron tomography
987:Electron holography
930:Cathodoluminescence
709:Secondary electrons
699:Electron scattering
643:Electron microscopy
629:Electron microscopy
561:2008NanoL...8.3582M
510:2009Sci...323.1705G
467:2009PhRvL.102i6101E
409:2008MiMic..14..469K
349:2008STAdM...9a4111T
292:2008STAdM...9a4107R
274:H. H. Rose (2008).
174:—a single sheet of
1222:Digital Micrograph
828:Environmental SEM
750:Field emission gun
714:X-ray fluorescence
331:N. Tanaka (2008).
128:field emission gun
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1299:Research projects
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1115:Nestor J. Zaluzec
1110:Maximilian Haider
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242:. March 26, 2009.
215:10.1557/mrs2006.4
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260:on 2011-07-16.
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1212:EM Data Bank
1176:Nion Company
1070:Dennis Gabor
1060:Albert Crewe
838:Confocal SEM
735:Electron gun
684:Auger effect
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154:Applications
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1156:FEI Company
1090:Harald Rose
1080:Ernst Ruska
769:Microscopes
677:with matter
675:interaction
160:orientation
132:Wien-filter
1288:Categories
1237:Multislice
1053:Developers
913:Techniques
658:Microscope
653:Micrograph
182:References
44:nanometers
1105:Max Knoll
760:Stigmator
549:Nano Lett
209:: 36–43.
164:germanium
104:spherical
1260:Category
1207:CrysTBox
1195:Software
866:Cryo-TEM
673:Electron
577:18563938
534:24762146
526:19325110
483:19392535
433:12689183
425:18793491
375:27877937
318:27877933
223:41889433
176:graphite
172:graphene
115:Hardware
48:hydrogen
1272:Commons
920:4D STEM
893:4D STEM
871:Cryo-ET
843:SEM-XRF
833:CryoSEM
790:Cryo-EM
648:History
557:Bibcode
506:Bibcode
498:Science
463:Bibcode
405:Bibcode
366:5099806
345:Bibcode
309:5099802
288:Bibcode
1217:EMsoft
1202:CASINO
1181:TESCAN
1046:Others
945:cryoEM
636:Basics
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1171:Leica
1017:PINEM
883:HRTEM
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530:S2CID
451:(PDF)
429:S2CID
393:(PDF)
219:S2CID
199:(PDF)
134:type
1232:IUCr
1166:JEOL
1037:WBDF
1032:WDXS
982:EBIC
977:EELS
972:ECCI
960:EBSD
940:CBED
888:STEM
573:PMID
522:PMID
479:PMID
421:PMID
371:PMID
314:PMID
168:gold
166:(),
106:and
34:The
1002:FEM
997:FIB
965:TKD
955:EDS
858:TEM
820:SEM
795:EMP
565:doi
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