96:) are the primary imaging methods for tomography tilt series acquisition. However, there are two issues associated with BF-TEM and HRTEM. First, acquiring an interpretable 3-D tomogram requires that the projected image intensities vary monotonically with material thickness. This condition is difficult to guarantee in BF/HRTEM, where image intensities are dominated by phase-contrast with the potential for multiple contrast reversals with thickness, making it difficult to distinguish voids from high-density inclusions. Second, the contrast transfer function of BF-TEM is essentially a
17:
129:
176:
equal slope tomography (EST) are used to address issues such as image noise, sample drift, and limited data. ADF-STEM tomography has recently been used to directly visualize the atomic structure of screw dislocations in nanoparticles. AET has also been used to find the 3D coordinates of 3,769 atoms
181:(EELS) allows for investigation of electronic states in addition to 3D reconstruction. Challenges to atomic level resolution from electron tomography include the need for better reconstruction algorithms and increased precision of tilt angle required to image defects in non-crystalline samples.
189:
The most popular tilting methods are the single-axis and the dual-axis tilting methods. The geometry of most specimen holders and electron microscopes normally precludes tilting the specimen through a full 180Β° range, which can lead to artifacts in the 3D reconstruction of the target. Standard
63:
is passed through the sample at incremental degrees of rotation around the center of the target sample. This information is collected and used to assemble a three-dimensional image of the target. For biological applications, the typical resolution of ET systems are in the 5β20
190:
single-tilt sample holders have a limited rotation of Β±80Β°, leading to a missing wedge in the reconstruction. A solution is to use needle shaped-samples to allow for full rotation. By using dual-axis tilting, the reconstruction artifacts are reduced by a factor of
104:(ADF-STEM), which is typically used on material specimens, more effectively suppresses phase and diffraction contrast, providing image intensities that vary with the projected mass-thickness of samples up to micrometres thick for materials with low
112:, eliminating the edge-enhancing artifacts common in BF/HRTEM. Thus, provided that the features can be resolved, ADF-STEM tomography can yield a reliable reconstruction of the underlying specimen which is extremely important for its application in
1074:
Xu, Rui; Chen, Chien-Chun; Wu, Li; Scott, M. C.; Theis, W.; Ophus, Colin; Bartels, Matthias; Yang, Yongsoo; Ramezani-Dakhel, Hadi; Sawaya, Michael R.; Heinz, Hendrik; Marks, Laurence D.; Ercius, Peter; Miao, Jianwei (November 2015).
214:
compared to single-axis tilting. However, twice as many images need to be taken. Another method of obtaining a tilt-series is the so-called conical tomography method, in which the sample is tilted, and then rotated a complete turn.
880:
Chen, C. C.; Zhu, C.; White, E. R.; Chiu, C. Y.; Scott, M. C.; Regan, B. C.; Marks, L. D.; Huang, Y.; Miao, J. (2013). "Three-dimensional imaging of dislocations in a nanoparticle at atomic resolution".
156:
techniques cannot always be used to locate the coordinates of individual atoms in disordered materials. AET reconstructions are achieved using the combination of an ADF-STEM tomographic tilt series and
1342:
Van Aarle, W.; Palenstijn, WJ.; De
Beenhouwer, J; Alantzis, T; Bals, S; Batenburg, J; Sijbers, J (2015). "The ASTRA Toolbox: a platform for advanced algorithm development in electron tomography".
1238:
Van Aarle, W.; Palenstijn, WJ.; De
Beenhouwer, J; Alantzis, T; Bals, S; Batenburg, J; Sijbers, J (2015). "The ASTRA Toolbox: a platform for advanced algorithm development in electron tomography".
616:
Van Aarle, W.; Palenstijn, WJ.; De
Beenhouwer, J; Alantzis, T; Bals, S; Batenburg, J; Sijbers, J (2015). "The ASTRA Toolbox: a platform for advanced algorithm development in electron tomography".
212:
100:β information at low spatial frequencies is significantly suppressed β resulting in an exaggeration of sharp features. However, the technique of annular dark-field
342:
R. A. Crowther; D. J. DeRosier; A. Klug (1970). "The
Reconstruction of a Three-Dimensional Structure from Projections and its Application to Electron Microscopy".
1023:
Li, H.; Xin, H. L.; Muller, D. A.; Estroff, L. A. (2009). "Visualizing the 3D Internal
Structure of Calcite Single Crystals Grown in Agarose Hydrogels".
758:
Xin, H. L.; Ercius, P.; Hughes, K. J.; Engstrom, J. R.; Muller, D. A. (2010). "Three-dimensional imaging of pore structures inside low-ΞΊ dielectrics".
93:
1439:
177:
in a tungsten needle with 19 pm precision and 20,000 atoms in a multiply twinned palladium nanoparticle. The combination of AET with
101:
136:
Atomic level resolution in 3D electron tomography reconstructions has been demonstrated. Reconstructions of crystal defects such as
1132:
Pelz, Philipp M.; Groschner, Catherine; Bruefach, Alexandra; Satariano, Adam; Ophus, Colin; Scott, Mary C. (25 January 2022).
723:; Weyland, M. (2003). "3D electron microscopy in the physical sciences: The development of Z-contrast and EFTEM tomography".
402:
269:
169:
1444:
461:
Y. Yang; et al. (2017). "Deciphering chemical order/disorder and material properties at the single-atom level".
178:
522:
Scott, M. C.; Chen, C. C.; Mecklenburg, M.; Zhu, C.; Xu, R.; Ercius, P.; Dahmen, U.; Regan, B. C.; Miao, J. (2012).
120:. In 2010, a 3D resolution of 0.5Β±0.1Γ0.5Β±0.1Γ0.7Β±0.2 nm was achieved with a single-axis ADF-STEM tomography.
89:
56:
52:
426:
Mastronarde, D. N. (1997). "Dual-Axis
Tomography: An Approach with Alignment Methods That Preserve Resolution".
153:
1434:
244:
984:"Three-dimensional imaging of nanovoids in copper interconnects using incoherent bright field tomography"
843:
229:
69:
68:
range, suitable for examining supra-molecular multi-protein structures, although not the secondary and
1381:"Conical electron tomography of a chemical synapse: Polyhedral cages dock vesicles to the active zone"
523:
254:
1189:
Bals, Sara; Goris, Bart; De Backer, Annick; Van Aert, Sandra; Van
Tendeloo, Gustaaf (1 July 2016).
936:
239:
165:
193:
40:
1077:"Three-dimensional coordinates of individual atoms in materials revealed by electron tomography"
844:"Electron Tomography in the (S)TEM: From Nanoscale Morphological Analysis to 3D Atomic Imaging"
173:
80:. Recently, atomic resolution in 3D electron tomography reconstructions has been demonstrated.
1379:
Zampighi, G. A.; Fain, N; Zampighi, L. M.; Cantele, F; Lanzavecchia, S; Wright, E. M. (2008).
1298:
1032:
995:
948:
890:
767:
676:
538:
480:
351:
308:
1277:"Nanomaterial datasets to advance tomography in scanning transmission electron microscopy"
655:"Nanomaterial datasets to advance tomography in scanning transmission electron microscopy"
152:
in structures have been achieved. This method is relevant to the physical sciences, where
8:
859:
1302:
1036:
999:
952:
894:
771:
680:
542:
484:
355:
312:
1405:
1380:
1319:
1288:
1276:
1220:
1171:
1145:
1114:
1088:
1056:
914:
824:
697:
666:
654:
562:
504:
470:
408:
367:
324:
298:
249:
117:
736:
1410:
1364:
1324:
1260:
1224:
1215:
1175:
1163:
1106:
1048:
964:
906:
816:
740:
702:
638:
554:
496:
443:
412:
398:
371:
328:
234:
113:
1060:
828:
289:
R. Hovden; D. A. Muller (2020). "Electron tomography for functional nanomaterials".
1400:
1396:
1392:
1359:
1355:
1351:
1314:
1306:
1255:
1251:
1247:
1210:
1202:
1155:
1133:
1118:
1098:
1040:
1003:
956:
918:
898:
855:
806:
775:
732:
692:
684:
633:
629:
625:
596:
566:
546:
508:
488:
435:
390:
359:
316:
149:
97:
16:
264:
109:
141:
137:
44:
601:
584:
394:
20:
Basic principle of tomography: superposition free tomographic cross sections S
1428:
105:
51:, or materials specimens. Electron tomography is an extension of traditional
48:
1159:
1044:
811:
794:
1414:
1328:
1167:
1110:
1076:
1052:
968:
932:
910:
820:
744:
720:
706:
558:
500:
439:
363:
1310:
688:
447:
1206:
1134:"Simultaneous Successive Twinning Captured by Atomic Electron Tomography"
145:
77:
1341:
1237:
902:
615:
550:
492:
320:
1190:
224:
36:
1008:
983:
779:
128:
1102:
960:
580:
161:
158:
65:
1293:
1150:
1093:
939:(2009). "Electron tomography and holography in materials science".
671:
475:
341:
303:
116:. For 3D imaging, the resolution is traditionally described by the
60:
73:
579:
259:
1131:
982:
Ercius, P.; Weyland, M.; Muller, D. A.; Gignac, L. M. (2006).
793:
Miao, J.; Ercius, P.; Billinge, S. J. L. (23 September 2016).
795:"Atomic electron tomography: 3D structures without crystals"
583:; Kisielowski, C. F.; Croitoru, M.; Tendeloo, G. V. (2005).
1378:
1188:
981:
757:
521:
931:
288:
196:
132:
Schematic showing the concept of electron tomography.
123:
1022:
792:
206:
83:
1426:
879:
524:"Electron tomography at 2.4-Γ₯ngstrΓΆm resolution"
168:. Currently, algorithms such as the real-space
59:to collect the data. In the process, a beam of
719:
1073:
385:Frank, Joachim (2006). Frank, Joachim (ed.).
1274:
841:
652:
184:
425:
1404:
1363:
1318:
1292:
1259:
1214:
1149:
1092:
1007:
810:
696:
670:
637:
600:
474:
302:
102:scanning transmission electron microscopy
515:
127:
15:
1191:"Atomic resolution electron tomography"
842:Saghi, Zineb; Midgley, Paul A. (2012).
751:
460:
335:
1427:
873:
585:"Annular Dark Field Tomography in TEM"
88:In the field of biology, bright-field
384:
282:
270:X-ray diffraction computed tomography
860:10.1146/annurev-matsci-070511-155019
848:Annual Review of Materials Research
28:compared with the projected image P
13:
1440:Multidimensional signal processing
1275:B.D.A. Levin; et al. (2016).
653:B.D.A. Levin; et al. (2016).
170:algebraic reconstruction technique
92:(BF-TEM) and high-resolution TEM (
14:
1456:
179:electron energy loss spectroscopy
39:technique for obtaining detailed
124:Atomic Electron Tomography (AET)
90:transmission electron microscopy
57:transmission electron microscope
53:transmission electron microscopy
1372:
1335:
1268:
1231:
1182:
1125:
1067:
1016:
975:
925:
835:
786:
713:
1397:10.1523/JNEUROSCI.4639-07.2008
1356:10.1016/j.ultramic.2015.05.002
1252:10.1016/j.ultramic.2015.05.002
646:
630:10.1016/j.ultramic.2015.05.002
609:
573:
454:
419:
378:
84:BF-TEM and ADF-STEM tomography
1:
737:10.1016/S0304-3991(03)00105-0
428:Journal of Structural Biology
275:
589:Microscopy and Microanalysis
245:Positron emission tomography
7:
218:
207:{\displaystyle {\sqrt {2}}}
10:
1461:
260:tomviz tomography software
230:Tomographic reconstruction
108:. ADF-STEM also acts as a
1365:10067/1278340151162165141
1261:10067/1278340151162165141
1216:10067/1356900151162165141
639:10067/1278340151162165141
602:10.1017/S143192760550117X
395:10.1007/978-0-387-69008-7
255:X-ray computed tomography
185:Different tilting methods
1445:Condensed matter physics
265:imod tomography software
240:Cryo-electron tomography
33:Electron tomography (ET)
1385:Journal of Neuroscience
1160:10.1021/acsnano.1c07772
1045:10.1126/science.1178583
988:Applied Physics Letters
812:10.1126/science.aaf2157
760:Applied Physics Letters
937:Dunin-Borkowski, R. E.
440:10.1006/jsbi.1997.3919
364:10.1098/rspa.1970.0119
208:
174:fast Fourier transform
133:
29:
1311:10.1038/sdata.2016.41
689:10.1038/sdata.2016.41
344:Proc. R. Soc. Lond. A
209:
131:
19:
1207:10.1557/mrs.2016.138
194:
1435:Electron microscopy
1303:2016NatSD...360041L
1037:2009Sci...326.1244L
1031:(5957): 1244β1247.
1000:2006ApPhL..88x3116E
953:2009NatMa...8..271M
903:10.1038/nature12009
895:2013Natur.496...74C
772:2010ApPhL..96v3108X
681:2016NatSD...360041L
551:10.1038/nature10934
543:2012Natur.483..444S
493:10.1038/nature21042
485:2017Natur.542...75Y
387:Electron Tomography
356:1970RSPSA.317..319C
321:10.1557/mrs.2020.87
313:2020MRSBu..45..298H
1287:(160041): 160041.
665:(160041): 160041.
250:Crowther criterion
204:
134:
118:Crowther criterion
70:tertiary structure
30:
1087:(11): 1099β1103.
1009:10.1063/1.2213185
805:(6306): aaf2157.
780:10.1063/1.3442496
404:978-0-387-31234-7
350:(1530): 319β340.
235:3D reconstruction
202:
114:materials science
72:of an individual
1452:
1419:
1418:
1408:
1376:
1370:
1369:
1367:
1339:
1333:
1332:
1322:
1296:
1272:
1266:
1265:
1263:
1235:
1229:
1228:
1218:
1186:
1180:
1179:
1153:
1129:
1123:
1122:
1103:10.1038/nmat4426
1096:
1081:Nature Materials
1071:
1065:
1064:
1020:
1014:
1013:
1011:
979:
973:
972:
961:10.1038/nmat2406
941:Nature Materials
929:
923:
922:
877:
871:
870:
868:
866:
839:
833:
832:
814:
790:
784:
783:
755:
749:
748:
731:(3β4): 413β431.
717:
711:
710:
700:
674:
650:
644:
643:
641:
613:
607:
606:
604:
577:
571:
570:
528:
519:
513:
512:
478:
458:
452:
451:
423:
417:
416:
382:
376:
375:
339:
333:
332:
306:
286:
213:
211:
210:
205:
203:
198:
142:grain boundaries
98:high-pass filter
1460:
1459:
1455:
1454:
1453:
1451:
1450:
1449:
1425:
1424:
1423:
1422:
1391:(16): 4151β60.
1377:
1373:
1344:Ultramicroscopy
1340:
1336:
1281:Scientific Data
1273:
1269:
1240:Ultramicroscopy
1236:
1232:
1187:
1183:
1130:
1126:
1072:
1068:
1021:
1017:
980:
976:
930:
926:
889:(7443): 74β77.
878:
874:
864:
862:
840:
836:
791:
787:
756:
752:
725:Ultramicroscopy
718:
714:
659:Scientific Data
651:
647:
618:Ultramicroscopy
614:
610:
578:
574:
537:(7390): 444β7.
526:
520:
516:
469:(7639): 75β79.
459:
455:
424:
420:
405:
383:
379:
340:
336:
287:
283:
278:
221:
197:
195:
192:
191:
187:
138:stacking faults
126:
110:low-pass filter
86:
49:macro-molecular
27:
23:
12:
11:
5:
1458:
1448:
1447:
1442:
1437:
1421:
1420:
1371:
1334:
1267:
1230:
1201:(7): 525β530.
1181:
1144:(1): 588β596.
1124:
1066:
1015:
994:(24): 243116.
974:
947:(4): 271β280.
933:Midgley, P. A.
924:
872:
834:
785:
766:(22): 223108.
750:
721:Midgley, P. A.
712:
645:
608:
572:
514:
453:
434:(3): 343β352.
418:
403:
377:
334:
297:(4): 298β304.
280:
279:
277:
274:
273:
272:
267:
262:
257:
252:
247:
242:
237:
232:
227:
220:
217:
201:
186:
183:
172:(ART) and the
166:reconstruction
125:
122:
85:
82:
43:structures of
25:
21:
9:
6:
4:
3:
2:
1457:
1446:
1443:
1441:
1438:
1436:
1433:
1432:
1430:
1416:
1412:
1407:
1402:
1398:
1394:
1390:
1386:
1382:
1375:
1366:
1361:
1357:
1353:
1349:
1345:
1338:
1330:
1326:
1321:
1316:
1312:
1308:
1304:
1300:
1295:
1290:
1286:
1282:
1278:
1271:
1262:
1257:
1253:
1249:
1245:
1241:
1234:
1226:
1222:
1217:
1212:
1208:
1204:
1200:
1196:
1192:
1185:
1177:
1173:
1169:
1165:
1161:
1157:
1152:
1147:
1143:
1139:
1135:
1128:
1120:
1116:
1112:
1108:
1104:
1100:
1095:
1090:
1086:
1082:
1078:
1070:
1062:
1058:
1054:
1050:
1046:
1042:
1038:
1034:
1030:
1026:
1019:
1010:
1005:
1001:
997:
993:
989:
985:
978:
970:
966:
962:
958:
954:
950:
946:
942:
938:
934:
928:
920:
916:
912:
908:
904:
900:
896:
892:
888:
884:
876:
861:
857:
853:
849:
845:
838:
830:
826:
822:
818:
813:
808:
804:
800:
796:
789:
781:
777:
773:
769:
765:
761:
754:
746:
742:
738:
734:
730:
726:
722:
716:
708:
704:
699:
694:
690:
686:
682:
678:
673:
668:
664:
660:
656:
649:
640:
635:
631:
627:
623:
619:
612:
603:
598:
594:
590:
586:
582:
576:
568:
564:
560:
556:
552:
548:
544:
540:
536:
532:
525:
518:
510:
506:
502:
498:
494:
490:
486:
482:
477:
472:
468:
464:
457:
449:
445:
441:
437:
433:
429:
422:
414:
410:
406:
400:
396:
392:
388:
381:
373:
369:
365:
361:
357:
353:
349:
345:
338:
330:
326:
322:
318:
314:
310:
305:
300:
296:
292:
285:
281:
271:
268:
266:
263:
261:
258:
256:
253:
251:
248:
246:
243:
241:
238:
236:
233:
231:
228:
226:
223:
222:
216:
199:
182:
180:
175:
171:
167:
163:
160:
155:
151:
147:
143:
139:
130:
121:
119:
115:
111:
107:
106:atomic number
103:
99:
95:
91:
81:
79:
75:
71:
67:
62:
58:
54:
50:
46:
42:
38:
34:
18:
1388:
1384:
1374:
1347:
1343:
1337:
1284:
1280:
1270:
1243:
1239:
1233:
1198:
1195:MRS Bulletin
1194:
1184:
1141:
1137:
1127:
1084:
1080:
1069:
1028:
1024:
1018:
991:
987:
977:
944:
940:
927:
886:
882:
875:
863:. Retrieved
851:
847:
837:
802:
798:
788:
763:
759:
753:
728:
724:
715:
662:
658:
648:
621:
617:
611:
592:
588:
575:
534:
530:
517:
466:
462:
456:
431:
427:
421:
386:
380:
347:
343:
337:
294:
291:MRS Bulletin
290:
284:
188:
146:dislocations
135:
87:
45:sub-cellular
32:
31:
865:13 December
78:polypeptide
55:and uses a
1429:Categories
1294:1606.02938
1151:2109.06954
1094:1505.05938
672:1606.02938
476:1607.02051
304:2006.01652
276:References
225:Tomography
162:algorithms
37:tomography
1350:: 35β47.
1246:: 35β47.
1225:139058353
1176:237513855
854:: 59β79.
624:: 35β47.
413:241282825
372:122980366
329:216522865
159:iterative
61:electrons
1415:18417694
1329:27272459
1168:34783237
1138:ACS Nano
1111:26390325
1061:40526826
1053:19965470
969:19308086
911:23535594
829:30174421
821:27708010
745:12871805
707:27272459
581:Bals, S.
559:22437612
501:28150758
219:See also
150:twinning
1406:3844767
1320:4896123
1299:Bibcode
1119:5455024
1033:Bibcode
1025:Science
996:Bibcode
949:Bibcode
919:4410909
891:Bibcode
799:Science
768:Bibcode
698:4896123
677:Bibcode
567:1600103
539:Bibcode
509:4464276
481:Bibcode
448:9441937
352:Bibcode
309:Bibcode
154:cryo-EM
74:protein
1413:
1403:
1327:
1317:
1223:
1174:
1166:
1117:
1109:
1059:
1051:
967:
917:
909:
883:Nature
827:
819:
743:
705:
695:
565:
557:
531:Nature
507:
499:
463:Nature
446:
411:
401:
370:
327:
148:, and
1289:arXiv
1221:S2CID
1172:S2CID
1146:arXiv
1115:S2CID
1089:arXiv
1057:S2CID
915:S2CID
825:S2CID
667:arXiv
563:S2CID
527:(PDF)
505:S2CID
471:arXiv
409:S2CID
368:S2CID
325:S2CID
299:arXiv
94:HRTEM
35:is a
24:and S
1411:PMID
1325:PMID
1164:PMID
1107:PMID
1049:PMID
965:PMID
907:PMID
867:2022
817:PMID
741:PMID
703:PMID
555:PMID
497:PMID
444:PMID
399:ISBN
164:for
1401:PMC
1393:doi
1360:hdl
1352:doi
1348:157
1315:PMC
1307:doi
1256:hdl
1248:doi
1244:157
1211:hdl
1203:doi
1156:doi
1099:doi
1041:doi
1029:326
1004:doi
957:doi
899:doi
887:496
856:doi
807:doi
803:353
776:doi
733:doi
693:PMC
685:doi
634:hdl
626:doi
622:157
597:doi
547:doi
535:483
489:doi
467:542
436:doi
432:120
391:doi
360:doi
348:317
317:doi
76:or
1431::
1409:.
1399:.
1389:28
1387:.
1383:.
1358:.
1346:.
1323:.
1313:.
1305:.
1297:.
1283:.
1279:.
1254:.
1242:.
1219:.
1209:.
1199:41
1197:.
1193:.
1170:.
1162:.
1154:.
1142:16
1140:.
1136:.
1113:.
1105:.
1097:.
1085:14
1083:.
1079:.
1055:.
1047:.
1039:.
1027:.
1002:.
992:88
990:.
986:.
963:.
955:.
943:.
935:;
913:.
905:.
897:.
885:.
852:42
850:.
846:.
823:.
815:.
801:.
797:.
774:.
764:96
762:.
739:.
729:96
727:.
701:.
691:.
683:.
675:.
661:.
657:.
632:.
620:.
595:.
593:11
591:.
587:.
561:.
553:.
545:.
533:.
529:.
503:.
495:.
487:.
479:.
465:.
442:.
430:.
407:.
397:.
389:.
366:.
358:.
346:.
323:.
315:.
307:.
295:45
293:.
144:,
140:,
66:nm
47:,
41:3D
1417:.
1395::
1368:.
1362::
1354::
1331:.
1309::
1301::
1291::
1285:3
1264:.
1258::
1250::
1227:.
1213::
1205::
1178:.
1158::
1148::
1121:.
1101::
1091::
1063:.
1043::
1035::
1012:.
1006::
998::
971:.
959::
951::
945:8
921:.
901::
893::
869:.
858::
831:.
809::
782:.
778::
770::
747:.
735::
709:.
687::
679::
669::
663:3
642:.
636::
628::
605:.
599::
569:.
549::
541::
511:.
491::
483::
473::
450:.
438::
415:.
393::
374:.
362::
354::
331:.
319::
311::
301::
200:2
26:2
22:1
Text is available under the Creative Commons Attribution-ShareAlike License. Additional terms may apply.
