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approaches. Due to the increasing demand for rapid, affordable and reliable information in today's world, disposable sensors—low-cost and easy‐to‐use devices for short‐term monitoring or single‐shot measurements—have recently gained growing importance. Using this class of sensors, critical analytical
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developed the CCD in 1969. While researching the MOS process, they realized that an electric charge was the analogy of the magnetic bubble and that it could be stored on a tiny MOS capacitor. As it was fairly straightforward to fabricate a series of MOS capacitors in a row, they connected a suitable
112:
are still widely used. Their applications include manufacturing and machinery, airplanes and aerospace, cars, medicine, robotics and many other aspects of our day-to-day life. There is a wide range of other sensors that measure chemical and physical properties of materials, including optical sensors
121:
assuming a linear characteristic). Some sensors can also affect what they measure; for instance, a room temperature thermometer inserted into a hot cup of liquid cools the liquid while the liquid heats the thermometer. Sensors are usually designed to have a small effect on what is measured; making
182:
is then defined as the ratio between the output signal and measured property. For example, if a sensor measures temperature and has a voltage output, the sensitivity is constant with the units . The sensitivity is the slope of the transfer function. Converting the sensor's electrical output (for
437:
is a sensor architecture with multiple sensor components that create a pattern for analyte detection from the additive responses of individual sensor components. There exist several types of chemical sensor arrays including electronic, optical, acoustic wave, and potentiometric devices. These
1252:
Svigelj, Rossella; Dossi, Nicolo; Pizzolato, Stefania; Toniolo, Rosanna; Miranda-Castro, Rebeca; de-los-Santos-Álvarez, Noemí; Lobo-Castañón, María Jesús (1 October 2020). "Truncated aptamers as selective receptors in a gluten sensor supporting direct measurement in a deep eutectic solvent".
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example V) to the measured units (for example K) requires dividing the electrical output by the slope (or multiplying by its reciprocal). In addition, an offset is frequently added or subtracted. For example, −40 must be added to the output if 0 V output corresponds to −40 C input.
64:
116:
A sensor's sensitivity indicates how much its output changes when the input quantity it measures changes. For instance, if the mercury in a thermometer moves 1 cm when the temperature changes by 1 °C, its sensitivity is 1 cm/°C (it is basically the slope
270:
error causes the output value to vary depending on the previous input values. If a sensor's output is different depending on whether a specific input value was reached by increasing vs. decreasing the input, then the sensor has a hysteresis
238:
is deviation of a sensor's transfer function from a straight line transfer function. Usually, this is defined by the amount the output differs from ideal behavior over the full range of the sensor, often noted as a percentage of the full
408:
materials are going to substitute to some extent recognition biomaterials, a sharp distinction between a biosensor and a standard chemical sensor is superfluous. Typical biomimetic materials used in sensor development are
1027:
The source states "controls" rather than "sensors", so its applicability is assumed. Many units are derived from the basic measurements to which it refers, such as a liquid's level measured by a differential pressure
81:
In the broadest definition, a sensor is a device, module, machine, or subsystem that detects events or changes in its environment and sends the information to other electronics, frequently a computer processor.
580:-sensitive MOSFET demonstrated by I. Lundstrom, M.S. Shivaraman, C.S. Svenson and L. Lundkvist in 1975. The ISFET is a special type of MOSFET with a gate at a certain distance, and where the
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or sites included in the structure of the recognition element of the sensor. Consequently, a characteristic physical parameter varies and this variation is reported by means of an integrated
481:
and in vivo applications. The encapsulation of the biological component in biosensors, presents a slightly different problem that ordinary sensors; this can either be done by means of a
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The sensor may to some extent be sensitive to properties other than the property being measured. For example, most sensors are influenced by the temperature of their environment.
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The sensor may to some extent be sensitive to properties other than the property being measured. For example, most sensors are influenced by the temperature of their environment.
210:
Since the range of the output signal is always limited, the output signal will eventually reach a minimum or maximum when the measured property exceeds the limits. The
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Toniolo, Rosanna; Dossi, Nicolò; Giannilivigni, Emanuele; Fattori, Andrea; Svigelj, Rossella; Bontempelli, Gino; Giacomino, Agnese; Daniele, Salvatore (3 March 2020).
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Dincer, Can; Bruch, Richard; Costa‐Rama, Estefanía; Fernández‐Abedul, Maria Teresa; Merkoçi, Arben; Manz, Andreas; Urban, Gerald Anton; Güder, Firat (2019-05-15).
2318:
M. Kretschmar and S. Welsby (2005), Capacitive and
Inductive Displacement Sensors, in Sensor Technology Handbook, J. Wilson editor, Newnes: Burlington, MA.
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The MOSFET invented at Bell Labs between 1955 and 1960, MOSFET sensors (MOS sensors) were later developed, and they have since been widely used to measure
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voltage to them so that the charge could be stepped along from one to the next. The CCD is a semiconductor circuit that was later used in the first
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is the smallest change that can be detected in the quantity that is being measured. The resolution of a sensor with a digital output is usually the
372:
A chemical sensor is a self-contained analytical device that can provide information about the chemical composition of its environment, that is, a
1306:
Albert, Keith J.; Lewis, Nathan S.; Schauer, Caroline L.; Sotzing, Gregory A.; Stitzel, Shannon E.; Vaid, Thomas P.; Walt, David R. (2000-07-01).
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may in practice differ from the value specified. This is called a sensitivity error. This is an error in the slope of a linear transfer function.
113:
for refractive index measurement, vibrational sensors for fluid viscosity measurement, and electro-chemical sensors for monitoring pH of fluids.
89:) and lamps which dim or brighten by touching the base, and in innumerable applications of which most people are never aware. With advances in
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can cause a dynamic error, or if the input variable or added noise changes periodically at a frequency near a multiple of the sampling rate,
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platforms, the uses of sensors have expanded beyond the traditional fields of temperature, pressure and flow measurement, for example into
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with which the measurement is made, but they are not the same thing. A sensor's accuracy may be considerably worse than its resolution.
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information can be obtained by anyone, anywhere and at any time, without the need for recalibration and worrying about contamination.
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parameters. The earliest MOSFET sensors include the open-gate field-effect transistor (OGFET) introduced by
Johannessen in 1970, the
274:
If the sensor has a digital output, the output is essentially an approximation of the measured property. This error is also called
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For an analog sensor signal to be processed or used in digital equipment, it needs to be converted to a digital signal, using an
2065:
2321:
C. A. Grimes, E. C. Dickey, and M. V. Pishko (2006), Encyclopedia of
Sensors (10-Volume Set), American Scientific Publishers.
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technology. In most cases, a microsensor reaches a significantly faster measurement time and higher sensitivity compared with
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sensors are sensors that physically mimic structures and functions of biological neural entities. One example of this is the
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Let’s get
Physiqual – An intuitive and generic method to combine sensor technology with ecological momentary assessments
473:. Whereas a non-biological sensor, even organic (carbon chemistry), for biological analytes is referred to as sensor or
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https://web.archive.org/web/20160304105724/http://www.cbm-sweden.se/images/Seminarie/Class_Descriptions_IDA_MEMS.pdf
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chemical sensor arrays can employ multiple sensor types that are cross-reactive or tuned to sense specific analytes.
2331:
Blaauw, F.J., Schenk, H.M., Jeronimus, B.F., van der Krieke, L., de Jonge, P., Aiello, M., Emerencia, A.C. (2016).
950:
644:
275:
17:
1973:
Matsumoto, Kazuya; et al. (1985). "A new MOS phototransistor operating in a non-destructive readout mode".
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2185:"A Mini-System Integrated with Metal-Oxide-Semiconductor Sensor and Micro-Packed Gas Chromatographic Column"
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that generates the output signal. A chemical sensor based on recognition material of biological nature is a
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380:. The information is provided in the form of a measurable physical signal that is correlated with the
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If the output signal differs from the correct value by a constant, the sensor has an offset error or
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showing sensitivity error and phase shift as a function of the frequency of a periodic input signal.
37:"Detector" redirects here. For detector circuits in radio and other signal-related electronics, see
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2015:
Eric R. Fossum (1993), "Active Pixel
Sensors: Are CCD's Dinosaurs?" Proc. SPIE Vol. 1900, p. 2–14,
31:
2251:. The Kluwer International Series in Engineering and Computer Science. Vol. 80. Norwell, MA:
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992:
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730:
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388:). Two main steps are involved in the functioning of a chemical sensor, namely, recognition and
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659:(ENFET) and immunologically modified FET (IMFET). By the early 2000s, BioFET types such as the
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109:
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is a device that produces an output signal for the purpose of detecting a physical phenomenon.
1920:
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If the output signal slowly changes independent of the measured property, this is defined as
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1174:"Modified Screen Printed Electrode Suitable for Electrochemical Measurements in Gas Phase"
8:
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1512:"A Review of Current Neuromorphic Approaches for Vision, Auditory, and Olfactory Sensors"
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it is insensitive to any other property likely to be encountered in its application, and
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1017:. London: Peter Peregrinus Ltd. on behalf of the Institution of Electrical Engineers.
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Sun, Jianhai; Geng, Zhaoxin; Xue, Ning; Liu, Chunxiu; Ma, Tianjun (17 August 2018).
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2999:
2648:
2520:
2256:
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1990:
1955:
1946:
Boyle, William S; Smith, George E. (1970). "Charge
Coupled Semiconductor Devices".
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312:, such as filtering, usually at the expense of the dynamic behavior of the sensor.
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257:. Long term drift over months or years is caused by physical changes in the sensor.
38:
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By the mid-1980s, numerous other MOSFET sensors had been developed, including the
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2066:"The Optical Mouse, and an Architectural Methodology for Smart Digital Sensors"
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Sensors are used in everyday objects such as touch-sensitive elevator buttons (
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1860:"Recent advances in biologically sensitive field-effect transistors (BioFETs)"
1409:
304:. Systematic errors can sometimes be compensated for by means of some kind of
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Parametric Analog Signal
Amplification Applied to Nanoscale CMOS Technologies
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FET (GASFET), surface accessible FET (SAFET), charge flow transistor (CFT),
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Technological progress allows more and more sensors to be manufactured on a
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or chemically constrains the macromolecule by bounding it to the scaffold.
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the sensor smaller often improves this and may introduce other advantages.
68:
2133:"LiDAR vs. 3D ToF Sensors — How Apple Is Making AR Better for Smartphones"
465:
thanks to a biological component, such as cells, protein, nucleic acid or
242:
Deviation caused by rapid changes of the measured property over time is a
3249:
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2341:
http://www.cbm-sweden.se/images/Seminarie/Class_Descriptions_IDA_MEMS.pdf
1994:
930:
835:
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493:, or a 3D polymer matrix, which either physically constrains the sensing
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229:
134:
27:
Converter that measures a physical quantity and converts it into a signal
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3203:
2994:
2550:
2471:
1827:"40 years of ISFET technology: From neuronal sensing to DNA sequencing"
1578:
1480:
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1115:"Disposable Sensors in Diagnostics, Food, and Environmental Monitoring"
987:
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581:
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392:. In the recognition step, analyte molecules interact selectively with
267:
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range defines the maximum and minimum values of the measured property.
211:
2201:
1672:. Berlin, Heidelberg: Springer-Verlag Berlin Heidelberg. p. 321.
1617:
1602:"Surface Protection and Selective Masking during Diffusion in Silicon"
1410:"The Optoelectronic Nose: Colorimetric and Fluorometric Sensor Arrays"
1323:
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1886:
1465:"Optical sensor arrays for chemical sensing: the optoelectronic nose"
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1463:
Askim, Jon R.; Mahmoudi, Morteza; Suslick, Kenneth S. (2013-10-21).
1307:
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1059:
Machinery
Prognostics and Prognosis Oriented Maintenance Management
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introduced in 1999, most optical mouse devices use CMOS sensors.
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is the minimum distance that can be accurately measured by any
63:
57:
45:
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1858:
Schöning, Michael J.; Poghossian, Arshak (10 September 2002).
544:
A number of MOSFET sensors have been developed, for measuring
3097:
3004:
2864:
2628:
1229:
Chemical
Sensors and Biosensors:Fundamentals and Applications
955:
791:
760:
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in 1985. The CMOS active-pixel sensor was later developed by
648:
613:
260:
1408:
Li, Zheng; Askim, Jon R.; Suslick, Kenneth S. (2019-01-09).
1251:
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sensor (bottom, center), as part of the camera system on an
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2335:. Journal of Biomedical Informatics, vol. 63, page 141–149.
774:
sensor chip. Since the first commercial optical mouse, the
702:
225:
202:, several types of deviations can occur which limit sensor
2071:. In H. T. Kung; Robert F. Sproull; Guy L. Steele (eds.).
2017:
Charge-Coupled
Devices and Solid State Optical Sensors III
1972:
1695:"The mechanisms for silicon oxidation in steam and oxygen"
2962:
2907:
1510:
Vanarse, Anup; Osseiran, Adam; Rassau, Alexander (2016).
1353:
Johnson, Kevin J.; Rose-Pehrsson, Susan L. (2015-07-10).
1305:
899:
585:
308:
strategy. Noise is a random error that can be reduced by
2152:
Omura, Yasuhisa; Mallik, Abhijit; Matsuo, Naoto (2017).
1456:
1401:
332:
of the digital output. The resolution is related to the
263:
is a random deviation of the signal that varies in time.
2242:
Mead, Carver A.; Ismail, Mohammed, eds. (May 8, 1989).
2155:
MOS Devices for Low-Voltage and Low-Energy Applications
1346:
1299:
625:
141:
1231:. Chichester, UK: John Wiley & Sons. p. 576.
2034:"The Optical Mouse: Early Biomimetic Embedded Vision"
1509:
1462:
1352:
1062:. Wiley & Sons Singapore Pte. Ltd. p. 107.
1825:Chris Toumazou; Pantelis Georgiou (December 2011).
2104:Brain, Marshall; Carmack, Carmen (24 April 2000).
1857:
352:, the distance resolution is usually equal to the
2151:
1563:"Frosch and Derick: Fifty Years Later (Foreword)"
755:technology. The first optical mouse, invented by
3287:
1922:The Electronics Revolution: Inventing the Future
246:error. Often, this behavior is described with a
1355:"Sensor Array Design for Complex Sensing Tasks"
2526:Radio-frequency microelectromechanical systems
1692:
1407:
30:"Sensors" redirects here. For other uses, see
2689:
2366:
2182:
1561:Huff, Howard; Riordan, Michael (2007-09-01).
2283:
2245:Analog VLSI Implementation of Neural Systems
2103:
1599:
1082:
167:it does not influence the measured property.
1914:
1912:
1853:
1851:
1849:
1767:
1765:
1763:
1761:
1759:
1757:
1560:
740:(APS) was developed by Tsutomu Nakamura at
3138:Heating, ventilation, and air conditioning
2696:
2682:
2373:
2359:
2241:
1966:
1945:
1699:Journal of Physics and Chemistry of Solids
1055:
1015:A History of Control Engineering 1930–1955
296:All these deviations can be classified as
281:If the signal is monitored digitally, the
2541:Biological microelectromechanical systems
2218:
2200:
2075:. Computer Science Press. pp. 1–19.
1725:
1637:Technical Memorandum of Bell Laboratories
1537:
1527:
1274:
1140:
1130:
384:of a certain chemical species (termed as
356:(total noise) of the signal expressed in
157:A good sensor obeys the following rules:
2277:
2009:
1918:
1909:
1846:
1771:
1754:
1633:"Silicon-Silicon Dioxide Surface Device"
785:
420:
198:Since sensors cannot replicate an ideal
161:it is sensitive to the measured property
145:
62:
1308:"Cross-Reactive Chemical Sensor Arrays"
1012:
693:MOS technology is the basis for modern
604:applications, such as the detection of
500:
14:
3288:
2145:
1606:Journal of the Electrochemical Society
1226:
902:substances. Other MOS sensors include
539:
2677:
2354:
2292:Springer Science & Business Media
1738:Springer Science & Business Media
1731:
1693:Ligenza, J.R.; Spitzer, W.G. (1960).
1667:
1630:
1567:The Electrochemical Society Interface
1359:Annual Review of Analytical Chemistry
1051:
1049:
781:
751:MOS image sensors are widely used in
562:ion-sensitive field-effect transistor
2235:
2060:
2038:Advances in Embedded Computer Vision
2028:
1925:. Springer. pp. 245 & 249.
1777:"The impact of MOSFET-based sensors"
1734:History of Semiconductor Engineering
1670:History of Semiconductor Engineering
1379:10.1146/annurev-anchem-062011-143205
1108:
1106:
802:MOS monitoring sensors are used for
477:. This terminology applies for both
193:
142:Classification of measurement errors
2703:
2380:
2284:Oliveira, Joao; Goes, João (2012).
1975:Japanese Journal of Applied Physics
1554:
671:BioFET (CPFET) had been developed.
24:
2531:Microoptoelectromechanical systems
2312:
1960:10.1002/j.1538-7305.1970.tb01790.x
1046:
367:
25:
3317:
1600:Frosch, C. J.; Derick, L (1957).
1227:Bǎnicǎ, Florinel-Gabriel (2012).
1103:
748:and his team in the early 1990s.
3114:
1089:. Upkar Prakashan. p. 194.
951:Chemical field-effect transistor
674:
645:chemical field-effect transistor
426:This section is an excerpt from
2176:
2125:
2097:
2054:
2040:. Springer. pp. 3–22 (3).
2022:
1939:
1818:
1686:
1661:
1624:
1593:
1503:
1083:Ganesh Kumar (September 2010).
2393:Microelectromechanical systems
1245:
1220:
1165:
1076:
1006:
600:. The ISFET is widely used in
515:
411:molecularly imprinted polymers
232:of a linear transfer function.
13:
1:
2073:VLSI Systems and Computations
1255:Biosensors and Bioelectronics
999:
315:
1804:10.1016/0250-6874(85)87009-8
1719:10.1016/0022-3697(60)90219-5
1190:10.1021/acs.analchem.9b04818
442:
7:
2081:10.1007/978-3-642-68402-9_1
1426:10.1021/acs.chemrev.8b00226
913:
882:sensors are used to detect
854:monitoring, and monitoring
661:DNA field-effect transistor
576:by P.F. Cox in 1974, and a
188:analog-to-digital converter
10:
3322:
2500:Digital micromirror device
2253:Kluwer Academic Publishers
1645:10.1142/9789814503464_0076
1267:10.1016/j.bios.2020.112339
1038:: CS1 maint: postscript (
678:
446:
425:
346:distance measuring devices
228:. This is an error in the
43:
36:
29:
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2513:
2490:
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2437:
2411:
2388:
2261:10.1007/978-1-4613-1639-8
1516:Frontiers in Neuroscience
3265:The House for the Future
3260:INTEGER Millennium House
2634:Shallow trench isolation
2106:"How Computer Mice Work"
1919:Williams, J. B. (2017).
1529:10.3389/fnins.2016.00115
1469:Chemical Society Reviews
1086:Modern General Knowledge
404:. However, as synthetic
44:Not to be confused with
32:Sensors (disambiguation)
3255:House navigation system
3143:Lighting control system
3050:Universal powerline bus
2789:Universal powerline bus
2419:Interdigital transducer
2019:, Morley M. Blouke; Ed.
993:Wireless sensor network
908:wireless sensor network
731:television broadcasting
708:(CMOS sensor), used in
461:, sensors which detect
110:force-sensing resistors
104:Analog sensors such as
2578:Surface micromachining
2477:Scratch drive actuator
1132:10.1002/adma.201806739
799:
326:measurement resolution
154:
129:as microsensors using
71:
3296:Measuring instruments
3163:Thermostat automation
2160:John Wiley & Sons
1784:Sensors and Actuators
789:
727:digital video cameras
699:charge-coupled device
685:Charge-coupled device
483:semipermeable barrier
435:chemical sensor array
428:Chemical sensor array
421:Chemical sensor array
350:time-of-flight camera
149:
66:
3270:Ubiquitous computing
2948:Bluetooth Low Energy
2825:Bluetooth Low Energy
2733:Hardware controllers
2654:Silicon on insulator
1995:10.1143/JJAP.24.L323
1178:Analytical Chemistry
1013:Bennett, S. (1993).
564:(ISFET) invented by
501:Neuromorphic sensors
330:numerical resolution
171:Most sensors have a
3240:Home energy monitor
3225:Building automation
2613:3D microfabrication
2583:Bulk micromachining
1987:1985JaJAP..24L.323M
1879:2002Ana...127.1137S
1832:Electronics Letters
1796:1985SeAc....8..109B
1711:1960JPCS...14..131L
1371:2015ARAC....8..287J
1056:Jihong Yan (2015).
904:intelligent sensors
738:active-pixel sensor
706:active-pixel sensor
689:Active-pixel sensor
657:enzyme-modified FET
598:reference electrode
540:Biochemical sensors
467:biomimetic polymers
342:distance resolution
67:Different types of
3220:Home of the future
2588:HAR micromachining
1948:Bell Syst. Tech. J
1732:Lojek, Bo (2007).
1668:Lojek, Bo (2007).
1631:KAHNG, D. (1961).
1579:10.1149/2.F02073IF
1481:10.1039/C3CS60179J
1119:Advanced Materials
910:(WSN) technology.
832:weather monitoring
816:traffic monitoring
800:
782:Monitoring sensors
630:genetic technology
584:is replaced by an
394:receptor molecules
354:standard deviation
283:sampling frequency
155:
72:
3283:
3282:
3110:
3109:
3106:
3105:
2916:
2915:
2671:
2670:
2667:
2666:
2559:
2558:
2270:978-1-4613-1639-8
2202:10.3390/mi9080408
2090:978-3-642-68404-3
1679:978-3-540-34258-8
1654:978-981-02-0209-5
1618:10.1149/1.2428650
1475:(22): 8649–8682.
1324:10.1021/cr980102w
1238:978-1-118-35423-0
1096:978-81-7482-180-5
1024:978-0-86341-280-6
968:Machine olfaction
828:traffic accidents
667:FET (GenFET) and
606:DNA hybridization
340:For example, the
322:sensor resolution
310:signal processing
298:systematic errors
289:errors may occur.
200:transfer function
194:Sensor deviations
176:transfer function
127:microscopic scale
16:(Redirected from
3313:
3118:
3000:C-Bus (protocol)
2931:
2930:
2755:
2754:
2748:Interconnection
2718:
2717:
2698:
2691:
2684:
2675:
2674:
2649:Photolithography
2568:
2567:
2521:Millipede memory
2482:Thermal actuator
2442:
2441:
2412:Basic structures
2375:
2368:
2361:
2352:
2351:
2306:
2305:
2281:
2275:
2274:
2250:
2239:
2233:
2232:
2222:
2204:
2180:
2174:
2173:
2162:. pp. 3–4.
2149:
2143:
2142:
2140:
2139:
2129:
2123:
2122:
2120:
2118:
2101:
2095:
2094:
2070:
2062:Lyon, Richard F.
2058:
2052:
2051:
2030:Lyon, Richard F.
2026:
2020:
2013:
2007:
2006:
1970:
1964:
1963:
1943:
1937:
1936:
1916:
1907:
1906:
1887:10.1039/B204444G
1873:(9): 1137–1151.
1864:
1855:
1844:
1843:
1841:
1839:
1822:
1816:
1815:
1781:
1775:(October 1985).
1769:
1752:
1751:
1729:
1723:
1722:
1690:
1684:
1683:
1665:
1659:
1658:
1628:
1622:
1621:
1597:
1591:
1590:
1558:
1552:
1551:
1541:
1531:
1507:
1501:
1500:
1460:
1454:
1453:
1414:Chemical Reviews
1405:
1399:
1398:
1350:
1344:
1343:
1318:(7): 2595–2626.
1312:Chemical Reviews
1303:
1297:
1296:
1278:
1249:
1243:
1242:
1224:
1218:
1217:
1184:(5): 3689–3696.
1169:
1163:
1162:
1144:
1134:
1110:
1101:
1100:
1080:
1074:
1073:
1053:
1044:
1043:
1037:
1029:
1010:
926:Data acquisition
892:hydrogen sulfide
804:house monitoring
768:
763:in 1980, used a
697:, including the
643:FET (PRESSFET),
120:
93:and easy-to-use
39:Detector (radio)
21:
3321:
3320:
3316:
3315:
3314:
3312:
3311:
3310:
3286:
3285:
3284:
3279:
3235:Home automation
3208:
3194:Mesh networking
3177:
3133:Audio and video
3119:
3102:
3075:
3069:
2978:
2972:
2936:interconnection
2935:
2925:
2923:
2912:
2891:
2815:Radio frequency
2801:
2749:
2742:
2707:
2705:Home automation
2702:
2672:
2663:
2617:
2555:
2509:
2486:
2458:
2433:
2407:
2398:Microtechnology
2384:
2382:Microtechnology
2379:
2315:
2313:Further reading
2310:
2309:
2302:
2282:
2278:
2271:
2248:
2240:
2236:
2181:
2177:
2170:
2150:
2146:
2137:
2135:
2131:
2130:
2126:
2116:
2114:
2102:
2098:
2091:
2068:
2064:(August 1981).
2059:
2055:
2048:
2027:
2023:
2014:
2010:
1971:
1967:
1944:
1940:
1933:
1917:
1910:
1862:
1856:
1847:
1837:
1835:
1823:
1819:
1779:
1770:
1755:
1748:
1740:. p. 120.
1730:
1726:
1691:
1687:
1680:
1666:
1662:
1655:
1629:
1625:
1598:
1594:
1559:
1555:
1508:
1504:
1461:
1457:
1406:
1402:
1351:
1347:
1304:
1300:
1250:
1246:
1239:
1225:
1221:
1170:
1166:
1125:(30): 1806739.
1111:
1104:
1097:
1081:
1077:
1070:
1054:
1047:
1031:
1030:
1025:
1011:
1007:
1002:
997:
973:Nanoelectronics
963:List of sensors
916:
884:carbon monoxide
874:, security and
784:
766:
757:Richard F. Lyon
722:George E. Smith
714:digital cameras
710:digital imaging
691:
679:Main articles:
677:
649:reference ISFET
641:pressure sensor
612:detection from
542:
518:
503:
451:
445:
440:
439:
431:
423:
370:
368:Chemical sensor
318:
196:
152:infrared sensor
144:
118:
95:microcontroller
61:
42:
35:
28:
23:
22:
18:Chemical sensor
15:
12:
11:
5:
3319:
3309:
3308:
3303:
3298:
3281:
3280:
3278:
3277:
3272:
3267:
3262:
3257:
3252:
3247:
3242:
3237:
3232:
3227:
3222:
3217:
3213:
3210:
3209:
3207:
3206:
3201:
3196:
3191:
3185:
3183:
3179:
3178:
3176:
3175:
3173:Smart home hub
3170:
3165:
3160:
3155:
3150:
3145:
3140:
3135:
3129:
3127:
3121:
3120:
3113:
3111:
3108:
3107:
3104:
3103:
3101:
3100:
3095:
3090:
3085:
3079:
3077:
3071:
3070:
3068:
3067:
3062:
3057:
3052:
3047:
3042:
3037:
3032:
3027:
3022:
3017:
3012:
3007:
3002:
2997:
2988:
2982:
2980:
2974:
2973:
2971:
2970:
2965:
2960:
2955:
2950:
2945:
2939:
2937:
2928:
2918:
2917:
2914:
2913:
2911:
2910:
2905:
2899:
2897:
2893:
2892:
2890:
2889:
2879:
2878:
2877:
2872:
2867:
2862:
2857:
2852:
2847:
2842:
2837:
2832:
2827:
2822:
2811:
2809:
2803:
2802:
2800:
2799:
2798:
2797:
2792:
2786:
2776:
2771:
2763:
2761:
2752:
2744:
2743:
2741:
2740:
2735:
2730:
2724:
2722:
2715:
2709:
2708:
2701:
2700:
2693:
2686:
2678:
2669:
2668:
2665:
2664:
2662:
2661:
2656:
2651:
2646:
2641:
2636:
2631:
2625:
2623:
2619:
2618:
2616:
2615:
2610:
2605:
2600:
2595:
2590:
2585:
2580:
2574:
2572:
2565:
2561:
2560:
2557:
2556:
2554:
2553:
2548:
2543:
2538:
2536:Microphotonics
2533:
2528:
2523:
2517:
2515:
2511:
2510:
2508:
2507:
2505:Optical switch
2502:
2496:
2494:
2488:
2487:
2485:
2484:
2479:
2474:
2468:
2466:
2460:
2459:
2457:
2456:
2454:Microbolometer
2450:
2448:
2439:
2435:
2434:
2432:
2431:
2426:
2421:
2415:
2413:
2409:
2408:
2406:
2405:
2403:Micromachinery
2400:
2395:
2389:
2386:
2385:
2378:
2377:
2370:
2363:
2355:
2349:
2348:
2337:
2336:
2329:
2319:
2314:
2311:
2308:
2307:
2300:
2276:
2269:
2234:
2175:
2168:
2144:
2124:
2096:
2089:
2053:
2046:
2021:
2008:
1965:
1954:(4): 587–593.
1938:
1931:
1908:
1845:
1817:
1790:(2): 109–127.
1773:Bergveld, Piet
1753:
1746:
1724:
1685:
1678:
1660:
1653:
1623:
1592:
1553:
1502:
1455:
1420:(1): 231–292.
1400:
1365:(1): 287–310.
1345:
1298:
1244:
1237:
1219:
1164:
1102:
1095:
1075:
1068:
1045:
1023:
1004:
1003:
1001:
998:
996:
995:
990:
985:
980:
975:
970:
965:
960:
959:
958:
953:
948:
938:
933:
928:
923:
917:
915:
912:
888:sulfur dioxide
783:
780:
701:(CCD) and the
676:
673:
669:cell-potential
541:
538:
517:
514:
502:
499:
489:membrane or a
447:Main article:
444:
441:
432:
424:
422:
419:
369:
366:
365:
364:
361:
358:unit of length
317:
314:
294:
293:
290:
279:
272:
264:
258:
251:
240:
233:
222:
215:
195:
192:
169:
168:
165:
162:
143:
140:
106:potentiometers
91:micromachinery
87:tactile sensor
26:
9:
6:
4:
3:
2:
3318:
3307:
3304:
3302:
3299:
3297:
3294:
3293:
3291:
3276:
3275:Xanadu Houses
3273:
3271:
3268:
3266:
3263:
3261:
3258:
3256:
3253:
3251:
3248:
3246:
3243:
3241:
3238:
3236:
3233:
3231:
3228:
3226:
3223:
3221:
3218:
3215:
3214:
3211:
3205:
3202:
3200:
3199:Organizations
3197:
3195:
3192:
3190:
3187:
3186:
3184:
3180:
3174:
3171:
3169:
3166:
3164:
3161:
3159:
3156:
3154:
3151:
3149:
3148:Other systems
3146:
3144:
3141:
3139:
3136:
3134:
3131:
3130:
3128:
3126:
3122:
3117:
3099:
3096:
3094:
3091:
3089:
3086:
3084:
3081:
3080:
3078:
3072:
3066:
3063:
3061:
3058:
3056:
3053:
3051:
3048:
3046:
3043:
3041:
3038:
3036:
3033:
3031:
3028:
3026:
3023:
3021:
3018:
3016:
3013:
3011:
3008:
3006:
3003:
3001:
2998:
2996:
2992:
2989:
2987:
2984:
2983:
2981:
2975:
2969:
2966:
2964:
2961:
2959:
2956:
2954:
2951:
2949:
2946:
2944:
2941:
2940:
2938:
2932:
2929:
2927:
2924:technologies,
2919:
2909:
2906:
2904:
2901:
2900:
2898:
2894:
2887:
2883:
2880:
2876:
2873:
2871:
2868:
2866:
2863:
2861:
2858:
2856:
2853:
2851:
2848:
2846:
2843:
2841:
2838:
2836:
2833:
2831:
2828:
2826:
2823:
2821:
2818:
2817:
2816:
2813:
2812:
2810:
2808:
2804:
2796:
2793:
2790:
2787:
2785:
2782:
2781:
2780:
2777:
2775:
2774:Optical fiber
2772:
2769:
2765:
2764:
2762:
2760:
2756:
2753:
2751:
2745:
2739:
2736:
2734:
2731:
2729:
2726:
2725:
2723:
2719:
2716:
2714:
2710:
2706:
2699:
2694:
2692:
2687:
2685:
2680:
2679:
2676:
2660:
2657:
2655:
2652:
2650:
2647:
2645:
2642:
2640:
2637:
2635:
2632:
2630:
2627:
2626:
2624:
2620:
2614:
2611:
2609:
2606:
2604:
2601:
2599:
2596:
2594:
2591:
2589:
2586:
2584:
2581:
2579:
2576:
2575:
2573:
2569:
2566:
2562:
2552:
2549:
2547:
2546:Microfluidics
2544:
2542:
2539:
2537:
2534:
2532:
2529:
2527:
2524:
2522:
2519:
2518:
2516:
2512:
2506:
2503:
2501:
2498:
2497:
2495:
2493:
2489:
2483:
2480:
2478:
2475:
2473:
2470:
2469:
2467:
2465:
2461:
2455:
2452:
2451:
2449:
2447:
2443:
2440:
2436:
2430:
2427:
2425:
2422:
2420:
2417:
2416:
2414:
2410:
2404:
2401:
2399:
2396:
2394:
2391:
2390:
2387:
2383:
2376:
2371:
2369:
2364:
2362:
2357:
2356:
2353:
2346:
2342:
2339:
2338:
2334:
2330:
2328:
2327:1-58883-056-X
2324:
2320:
2317:
2316:
2303:
2301:9781461416708
2297:
2294:. p. 7.
2293:
2289:
2288:
2280:
2272:
2266:
2262:
2258:
2254:
2247:
2246:
2238:
2230:
2226:
2221:
2216:
2212:
2208:
2203:
2198:
2194:
2190:
2189:Micromachines
2186:
2179:
2171:
2169:9781119107354
2165:
2161:
2157:
2156:
2148:
2134:
2128:
2113:
2112:
2111:HowStuffWorks
2107:
2100:
2092:
2086:
2082:
2078:
2074:
2067:
2063:
2057:
2049:
2047:9783319093871
2043:
2039:
2035:
2031:
2025:
2018:
2012:
2004:
2000:
1996:
1992:
1988:
1984:
1980:
1976:
1969:
1961:
1957:
1953:
1949:
1942:
1934:
1932:9783319490885
1928:
1924:
1923:
1915:
1913:
1904:
1900:
1896:
1892:
1888:
1884:
1880:
1876:
1872:
1868:
1861:
1854:
1852:
1850:
1834:
1833:
1828:
1821:
1813:
1809:
1805:
1801:
1797:
1793:
1789:
1785:
1778:
1774:
1768:
1766:
1764:
1762:
1760:
1758:
1749:
1747:9783540342588
1743:
1739:
1735:
1728:
1720:
1716:
1712:
1708:
1704:
1700:
1696:
1689:
1681:
1675:
1671:
1664:
1656:
1650:
1646:
1642:
1638:
1634:
1627:
1619:
1615:
1611:
1607:
1603:
1596:
1588:
1584:
1580:
1576:
1572:
1568:
1564:
1557:
1549:
1545:
1540:
1535:
1530:
1525:
1521:
1517:
1513:
1506:
1498:
1494:
1490:
1486:
1482:
1478:
1474:
1470:
1466:
1459:
1451:
1447:
1443:
1439:
1435:
1431:
1427:
1423:
1419:
1415:
1411:
1404:
1396:
1392:
1388:
1384:
1380:
1376:
1372:
1368:
1364:
1360:
1356:
1349:
1341:
1337:
1333:
1329:
1325:
1321:
1317:
1313:
1309:
1302:
1294:
1290:
1286:
1282:
1277:
1272:
1268:
1264:
1260:
1256:
1248:
1240:
1234:
1230:
1223:
1215:
1211:
1207:
1203:
1199:
1195:
1191:
1187:
1183:
1179:
1175:
1168:
1160:
1156:
1152:
1148:
1143:
1142:10044/1/69878
1138:
1133:
1128:
1124:
1120:
1116:
1109:
1107:
1098:
1092:
1088:
1087:
1079:
1071:
1069:9781118638729
1065:
1061:
1060:
1052:
1050:
1041:
1035:
1026:
1020:
1016:
1009:
1005:
994:
991:
989:
986:
984:
983:Sensing floor
981:
979:
976:
974:
971:
969:
966:
964:
961:
957:
954:
952:
949:
947:
944:
943:
942:
939:
937:
934:
932:
929:
927:
924:
922:
919:
918:
911:
909:
905:
901:
897:
893:
889:
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2429:Microchannel
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2127:
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880:gas detector
824:traffic jams
814:monitoring,
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776:IntelliMouse
750:
735:
692:
681:Image sensor
634:
572:FET (ADFET)
543:
536:parameters.
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510:event camera
506:Neuromorphic
504:
485:, such as a
452:
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341:
325:
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236:Nonlinearity
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3306:Transducers
3250:Home server
2977:Control and
2926:by function
2886:Consumer IR
2598:Lithography
1705:: 131–136.
1639:: 583–596.
1276:10651/57640
931:Data logger
856:temperature
818:(including
812:agriculture
746:Eric Fossum
647:(ChemFET),
620:detection,
594:electrolyte
588:-sensitive
516:MOS sensors
455:biomedicine
306:calibration
230:y-intercept
219:sensitivity
180:sensitivity
135:macroscopic
3290:Categories
3230:Floor plan
3204:Smart grid
3076:networking
2995:OpenWebNet
2979:automation
2593:Deposition
2551:Micropower
2472:Comb drive
2424:Cantilever
2195:(8): 408.
2138:2020-04-03
1612:(9): 547.
1261:: 112339.
1000:References
988:Transducer
978:Nanosensor
663:(DNAFET),
655:(BioFET),
637:gas sensor
602:biomedical
582:metal gate
570:adsorption
554:biological
530:biological
475:nanosensor
471:biosensors
406:biomimetic
398:transducer
316:Resolution
268:hysteresis
212:full scale
2943:Bluetooth
2820:Bluetooth
2779:Powerline
2728:Actuators
2659:Smart cut
2564:Processes
2464:Actuators
2211:2072-666X
2117:9 October
2003:108450116
1895:1364-5528
1812:0250-6874
1587:1064-8208
1573:(3): 29.
1489:1460-4744
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1434:0009-2665
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1214:211012680
1198:0003-2700
1151:0935-9648
1034:cite book
844:lightning
820:car speed
651:(REFET),
610:biomarker
449:Biosensor
443:Biosensor
402:biosensor
378:gas phase
334:precision
248:bode plot
3216:See also
3158:Security
3153:Robotics
3088:HomePlug
3083:Ethernet
3040:LonWorks
2953:FireWire
2882:Infrared
2850:MyriaNed
2807:Wireless
2721:Elements
2644:Lift-off
2622:Specific
2492:Switches
2229:30424341
2032:(2014).
1903:12375833
1548:27065784
1497:24091381
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876:lighting
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736:The MOS
618:antibody
590:membrane
578:hydrogen
574:patented
550:chemical
546:physical
526:chemical
522:physical
491:hydrogel
487:dialysis
479:in-vitro
463:analytes
415:aptamers
287:aliasing
204:accuracy
3301:Sensors
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3093:HomePNA
3045:One-Net
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3010:EnOcean
2991:Bus SCS
2986:AllJoyn
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2738:Sensors
2603:Etching
2571:General
2446:Sensors
2220:6187308
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1875:Bibcode
1867:Analyst
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1707:Bibcode
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278:error.
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3182:Other
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1289:S2CID
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761:Xerox
614:blood
376:or a
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119:dy/dx
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3074:Data
2958:IrDA
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2768:xDSL
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